Details.
Customer specific lamellar diffraction gratings on single-crystal silicon substrates are available for spectrometers and monochromators in the soft X-ray range. They can be produced as 1D standard periodical linear gratings, 1D VLS gratings, 2D VLS gratings, 3D VLS gratings and reflection zone plates. Planar substrates support line densities up to 5000 lines per mm. Spherical or toroidal substrates with minimum radius down to 4 m support line densities up to 1200 lines per mm. Gratings can be optimized for profile depth, groove ratio and coating material. Efficiency measurements and raytracing analysis are possible upon request.